EUV Lithography

The Extreme Ultra Violet Lithography (EUVL) at 13.5 nm is foreseen to be the technology of choice for the 32 nm device node and generations beyond. The EUVL operates at 13.5 nm wavelength, generated from gas Discharge or Laser Produced Plasma sources, GDPP or LPP, respectively.

In a typical EUV lithography scanner, the Collector optical system efficiently collects the EUV photons from the source and transmits it to the illumination and projection optics. Media Lario Technologies, leveraging its unique and proprietary experience and expertise, offers thermally managed optical collector systems utilizing highly optimized specialty EUV reflective coatings for the EUV lithography equipments Media Lario Technologies provides customized and efficient collector optical designs, incorporating both Grazing and Normal Incidence Collector design technologies, commonly known as GIC and NIC.

Wolter Grazing Incidence Collector

Efficient EUV Light Collection

High reflectivity, precisely aligned mirror shells provide 10-30 W EUV power @ IF.

 

Integrated Thermal Management System

MLT collector system is equipped with a proprietary thermal management and control system to maintain optical-thermal stability under high heat load from the EUV source and debris mitigation systems. In addition, the thermal management system is capable of active heating in order to enable in-situ cleaning to mitigate the contamination of the optical surfaces caused by the Sn debris emitted by the EUV source, reducing extended down time for components change.

 

Custom Tailored Optical Design

Collector design, coatings and alignment / mounting interfaces customizable to provide optimized solutions to source and illuminator requirements.

 

A proprietary electroforming process is used to replicate the metal mirror shells from high precision masters derived from the optical design in a cost-effective manner, reducing Cost-of-Ownership (CoO) and Cost-of-Consumable (CoC) for EUVL technology. Customized and optimized thin film reflective coatings are then applied through proprietary electroplating or Physical Vapor Deposition (PVD) processes.

Finally, the mirror shells are precisely aligned and integrated onto a precision mechanical interface, designed with a “plug and play” pre-aligned concept to minimize replacement downtime.